Thomas W. Kenny

Atomic and Molecular Physics, and Optics · 2000–2018

A researcher in the Science corpus: 27 papers; trusts 13 researchers and is trusted by 24 researchers here, as inferred from the citation graph.

Subfields

• Atomic and Molecular Physics, and Optics — 83 citations into it; #921 of 7,135 by trust here, #216 by citations
• Electrical and Electronic Engineering — 79 citations into it; #2,088 of 16,539 by trust here, #2,481 by citations
• Biomedical Engineering — 41 citations into it; #10,727 of 10,734 by trust here, #3,826 by citations
• Mechanical Engineering — 5 citations into it; #2,877 of 8,300 by trust here, #3,045 by citations

Whom Thomas W. Kenny trusts overall

Their strongest outbound trust, strongest first, inferred from their citations.

1. Bongsang Kim
2. Rob N. Candler
3. David S. Bindel

Who trusts Thomas W. Kenny overall

1. T. Harirchian
2. Eldwin Jiaqiang Ng
3. Kellar Autumn
4. Guoqiang Wu
5. S. Prabhakar
6. Suresh V. Garimella
7. Jerome P. Lynch
8. Satish G. Kandlikar

Papers from Thomas W. Kenny's perspective

Ordered by how strongly the researchers Thomas W. Kenny trusts endorse each paper. Same corpus, a different order for every researcher.

1. MEMS post-packaging by localized heating and bonding
2. Single wafer encapsulation of MEMS devices
3. A 12 MHz micromechanical bulk acoustic mode oscillator
4. Thermal conduction in doped single-crystal silicon films
5. Vacuum packaging technology using localized aluminum/silicon-to-glass bonding (Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090))
6. High-cycle fatigue of single-crystal silicon thin films
7. MEMS technology for timing and frequency control (IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control)
8. Thin Film Materials: Stress, Defect Formation and Surface Evolution
9. Impact of geometry on thermoelastic dissipation in micromechanical resonant beams (Journal of microelectromechanical systems)
10. Temperature-compensated high-stability silicon resonators

Their papers

• Quality factors in micron- and submicron-thick cantilevers (2000) — 710 citations
• Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions (2002) — 266 citations
• Engineering MEMS Resonators With Low Thermoelastic Damping (2006) — 257 citations
• Single wafer encapsulation of MEMS devices (2003) — 181 citations
• Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring (2003) — 153 citations
• Temperature Dependence of Quality Factor in MEMS Resonators (2006) — 184 citations
• Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators (2006) — 204 citations
• Impact of geometry on thermoelastic dissipation in micromechanical resonant beams (2006) — 138 citations
• A high-performance planar piezoresistive accelerometer (2000) — 205 citations
• Temperature-Insensitive Composite Micromechanical Resonators (2009) — 164 citations
• Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators (2007) — 151 citations
• Limits of quality factor in bulk-mode micromechanical resonators (2008) — 171 citations
• Closed-loop electroosmotic microchannel cooling system for VLSI circuits (2002) — 253 citations
• Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop (2010) — 205 citations
• Temperature-compensated high-stability silicon resonators (2007) — 135 citations
• What is the Young's Modulus of Silicon? (2010) — 1,962 citations
• Temperature Dependence of the Elastic Constants of Doped Silicon (2015) — 143 citations
• Design of large deflection electrostatic actuators (2003) — 236 citations
• 1/f noise considerations for the design and process optimization of piezoresistive cantilevers (2000) — 243 citations
• Effective quality factor tuning mechanisms in micromechanical resonators (2018) — 136 citations