What is the Young's Modulus of Silicon?

By Matt Hopcroft, W. Nix, Thomas W. Kenny. Journal of microelectromechanical systems, 2010

1,962 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/371ed298dba16172a6e36920f41d4188a852b375

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Eldwin Jiaqiang Ng
2. Yushi Yang
3. V. Hong
4. C. Ahn
5. Camille L. M. Everhart
6. Thomas W. Kenny

In Electrical and Electronic Engineering

1. Eldwin Jiaqiang Ng
2. Yushi Yang
3. V. Hong
4. C. Ahn
5. Camille L. M. Everhart
6. Thomas W. Kenny

Citations in the corpus

• Thermo-mechanical and fracture properties in single-crystal silicon (2013, result): “[36], the results given by Bourgeois et al.”
• Temperature Dependence of the Elastic Constants of Doped Silicon (2015, methodology): “Furthermore, the mechanical properties of monocrystalline silicon are well characterized [5], [6] and have been used successfully for the predictive modeling of numerous MEMS devices.”
• Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing (2013, background): “However, for silicon MEMS we can consider the change to be linear in the acceptable temperature range [15].”