MEMS technology for timing and frequency control

By C. T. Nguyen. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2005

666 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/20b83c6e92401d8f6913b454db9c63e2a4250bda

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Thomas W. Kenny
2. Saurabh A. Chandorkar
3. R. Melamud
4. Matt Hopcroft
5. Jian Zhu
6. Bongsang Kim
7. Shengqiang Cai
8. Ihab El-Kady

In Biomedical Engineering

1. Jian Zhu
2. Shengqiang Cai
3. Zhigang Suo
4. Thomas W. Kenny
5. Saurabh A. Chandorkar
6. Ihab El-Kady
7. Robert Puers
8. Reza Abdolvand

In Electrical and Electronic Engineering

1. Thomas W. Kenny
2. Saurabh A. Chandorkar
3. R. Melamud
4. Matt Hopcroft
5. Bongsang Kim
6. Ihab El-Kady
7. Jian Zhu
8. Robert Puers

Citations in the corpus

• Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators (2008, background): “Demonstrations of capacitive resonators with high Q are common [1], [2].”
• Resonant behavior of a membrane of a dielectric elastomer (2010, methodology): “Examples include MEMS-based oscillators used in sensing (Ekinci et al., 2004), timing, and frequency reference (Nguyen, 2007).”
• Temperature-Insensitive Composite Micromechanical Resonators (2009, background): “M ICROMACHINED silicon resonators are an attractive replacement for conventional quartz-crystal resonators in frequency reference applications due to their compatibility with high-volume bulk-fabrication processes and potential for CMOS integration [1].”
• A review of MEMS oscillators for frequency reference and timing applications (2011, background): “In [4], an extensive overview is given of capacitive resonators; however, their application in oscillators is only briefly discussed and a benchmark with other types of MEMS, CMOS and quartzbased oscillators is not covered.”
• Microfabricated phononic crystal devices and applications (2008, background): “as Si, polycrystalline Si and polycrystalline diamond have demonstrated record Q-frequency products of 2×1013 [43],”
• Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop (2010, background): “LARGELY BECAUSE of their small size and potential for system integration, microelectromechanical-system (MEMS) oscillators show great promise for use in future communication or timekeeping applications [2].”