Quality factors in micron- and submicron-thick cantilevers

By K. Yasumura, T. Stowe, Eugene M. Chow, Timothy Pfafman, Thomas W. Kenny, Barry C. Stipe, Daniel Rugar. Journal of microelectromechanical systems, 2000

710 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/7ef2f11a7c842a5f1df7a8e911393f66eb6a946d

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

Citations in the corpus

Nonlinear damping in a micromechanical oscillator (2009, background): “Physically, several processes may be responsible for mechanical damping [29, 30, 36, 76, 77], including thermoelastic effects [34, 35, 78], friction at grain boundaries [79], bulk and surface impurities [31, 80, 81], electrical losses, clamping loss [37, 82, 83], etc.”
An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations (2003, background): “Also, Cross and Lifshitz[17] have derived energy transmission formula for the elastic wave in a beam propagating into its support structure based on the two-dimensional elasticity theory.”
Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction (2008, background): “Subsequent studies have confirmed that TED contributes significantly to damping in both single-crystal [6], [7] and polycrystalline [8], [9] silicon, poly-SiGe [10], and silicon nitride [11].”
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, neutral): “ment (see, for example, [15–27]).”
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams (2006, background): “Surface dissipation losses, which are thought to be caused by the chemical states at the resonator surface, become more prominent as any of the resonator dimensions are scaled toward the nanometer regime [11], [22]–[24].”
Temperature Dependence of Quality Factor in MEMS Resonators (2006, neutral): “Thus, various possible energy loss mechanisms that can reduce the quality factor in MEMS resonators have been studied [10]–[26].”
Surface stress effects on the resonant properties of metal nanowires: The importance of finite deformation kinematics and the impact of the residual surface stress (2008, background): “We note that the present analysis was conducted on ideal, non-defective nanowires and thus did not consider factors that are known to deleteriously impact the resonant properties of nanostructures, including clamping losses, internal friction, surface losses and oxidation effects (Ekinci et al., 200”