Temperature Dependence of the Elastic Constants of Doped Silicon

By Eldwin Jiaqiang Ng, V. Hong, Yushi Yang, C. Ahn, Camille L. M. Everhart, Thomas W. Kenny. Journal of microelectromechanical systems, 2015

143 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fa0214df695c66277f6d5cdd67a284a2c4340dd9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Wen Chen
2. Eldwin Jiaqiang Ng
3. Jinghui Xu
4. Guoqiang Wu

In Biomedical Engineering

1. Wen Chen
2. Eldwin Jiaqiang Ng
3. Jinghui Xu
4. Guoqiang Wu

In Electrical and Electronic Engineering

1. Wen Chen
2. Eldwin Jiaqiang Ng
3. Jinghui Xu
4. Guoqiang Wu

Citations in the corpus

• MEMS Resonators for Frequency Reference and Timing Applications (2020, methodology): “The temperature dependences of the elastic constants of doped silicon are extracted by using a suite of different types and orientations of resonators with various doping concentrations [200], [201].”