Impact of geometry on thermoelastic dissipation in micromechanical resonant beams

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Temperature Dependence of Quality Factor in MEMS Resonators (2006, unknown): “This phenomenon is well described by the above expression for simple, rectangular beams, and can be modeled for other geometries [4, 5].”
Temperature-Insensitive Composite Micromechanical Resonators (2009, background): “The lowest quality factor is attained when the overlap between the thermal and mechanical modes is maximized [22], [23].”
Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction (2008, methodology): “complex geometries, numerical analysis using the method of finite elements is necessary to compute TED [20], [36].”
Temperature Dependence of the Elastic Constants of Doped Silicon (2015, background): “The Q for most of these resonators are known to be limited by thermoelastic dissipation [29]–[31], but could also be limited by the Akhieser effect [32] for the Lamé modes without release-etch holes.”