Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop

By J. Salvia, R. Melamud, Saurabh A. Chandorkar, Scott F. Lord, Thomas W. Kenny. Journal of microelectromechanical systems, 2010

205 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/51af070e1f376b2c3912d5623e9c8f317f4fbd7d

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Eldwin Jiaqiang Ng
2. Wen Chen
3. Jinghui Xu
4. Guoqiang Wu
5. Yushi Yang
6. V. Hong
7. C. Ahn
8. Camille L. M. Everhart

In Electrical and Electronic Engineering

1. Eldwin Jiaqiang Ng
2. Wen Chen
3. Jinghui Xu
4. Guoqiang Wu
5. Yushi Yang
6. V. Hong
7. C. Ahn
8. Camille L. M. Everhart

Citations in the corpus

• MEMS Resonators for Frequency Reference and Timing Applications (2020, methodology): “thermally isolated micro oven control [217]–[227], are usually used as the active temperature compensation methods for MEMS resonators.”
• Temperature Dependence of the Elastic Constants of Doped Silicon (2015, background): “2347205 loop combined with a micro-oven [10] or a temperature sensor [11], [12].”