Temperature-compensated high-stability silicon resonators
By R. Melamud, Bongsang Kim, Saurabh A. Chandorkar, Matt Hopcroft, M. Agarwal, C. Jha, Thomas W. Kenny. 2007
135 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/53871db1c53c3b679c71a81e7ead5a2576281611
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In Atomic and Molecular Physics, and Optics
- Thomas W. Kenny
- Saurabh A. Chandorkar
- R. Melamud
- Matt Hopcroft
- Bongsang Kim
- Scott F. Lord
- J. Salvia
- Eldwin Jiaqiang Ng
In Biomedical Engineering
In Electrical and Electronic Engineering
- Thomas W. Kenny
- Saurabh A. Chandorkar
- R. Melamud
- Matt Hopcroft
- Bongsang Kim
- Scott F. Lord
- J. Salvia
- Eldwin Jiaqiang Ng
Citations in the corpus
- Temperature-Insensitive Composite Micromechanical Resonators (2009, methodology): “Building on previous work [11], [12], the positive temperature coefficient of Young’s modulus of SiO2 is used to create temperature-insensitive electrostatically actuated siliconbased resonators.”
- Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop (2010, background): “The resulting composite Si/SiO2 resonators exhibit frequency–temperature characteristics that depend strongly on the ratio between the Si beamwidth and the SiO2 coating [5].”
- MEMS Resonators for Frequency Reference and Timing Applications (2020, unknown): “layer [191], [192].”