High-cycle fatigue of single-crystal silicon thin films

By C. Muhlstein, S. Brown, R. Ritchie. 2001

239 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Civil and Structural Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/9565fd154a9f59ff4be8590390cc0414c8389223

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1. Bongsang Kim
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Citations in the corpus

• Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators (2007, background): “Recent work has investigated possible fatigue in thin-film silicon for both single crystal and polysilicon [7,8]; however, fatigue of thin-film silicon is not fully understood and remains controversial [9–12].”