A high-performance planar piezoresistive accelerometer

By A. Partridge, J. Reynolds, B. Chui, Eugene M. Chow, A. Fitzgerald, Lianpei Zhang, Nadim I. Maluf, Thomas W. Kenny. Journal of microelectromechanical systems, 2000

205 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c1e6fa7361cd1acd9b04a5613bebd1d8a3632f7f

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Thomas W. Kenny
2. Woo-Tae Park
3. Rob N. Candler
4. Jerome P. Lynch
5. Eldwin Jiaqiang Ng

In Electrical and Electronic Engineering

1. Jerome P. Lynch
2. Thomas W. Kenny
3. Xinge Guo
4. Woo-Tae Park
5. Rob N. Candler
6. Gary Yama
7. Huimou J. Li
8. Qiongfeng Shi

Citations in the corpus

• Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring (2003, methodology): “Johnson noise is constant over all frequencies and is theoretically estimated to be 7 nV for the piezoresistors implanted in the accelerometer’s flexural element (Partridge et al. 2000).”
• Development Trends and Perspectives of Future Sensors and MEMS/NEMS (2019, background): “The variance of the resistance was corresponding with the material deflection itself [46].”
• Single wafer encapsulation of MEMS devices (2003, background): “to a thin flexure which is connected to an anchor at the other end [20].”