A 12 MHz micromechanical bulk acoustic mode oscillator

By T. Mattila, J. Kiihamäki, T. Lamminmäki, O. Jaakkola, P. Rantakari, A. Oja, Heikki Seppä, H. Kattelus, I. Tittonen. 2002

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Modelling the dynamics of a MEMS resonator : simulations and experiments (2008, methodology): “Next, the modified stiffness k0,e = k0 − 2(C0/d2 0 )V 2 dc and the electromechanical coupling coefficient (see ref. [ 14 ]) η =( C0/d0)Vdc are defined.”
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams (2006, background): “Bulk mode silicon resonators have been reported at 12 MHz with a Q of 180,000 [21].”
Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications (2004, unknown): “With increasing bias voltage, the resonator peak shifts to a lower frequency due to the first-order nonlinearity in a parallel plate electromechanical coupling that results in electrical spring softening [4].”
Nonlinear limits for single-crystal silicon microresonators (2004, background): “Using a typical values of , , and for a 13 MHz BAW resonator [2], the critical vibration amplitude given by (8) is and the corresponding maximum energy is .”