Engineering MEMS Resonators With Low Thermoelastic Damping

By Amy E. Duwel, Rob N. Candler, Thomas W. Kenny, Mathew Varghese. Journal of microelectromechanical systems, 2006

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Impact of geometry on thermoelastic dissipation in micromechanical resonant beams (2006, background): “Information regarding the methodology of these can be found in [25]–[27].”
Limits of quality factor in bulk-mode micromechanical resonators (2008, methodology): “1 Thermoelastic dissipation In order to quantify TED, we introduce the concept of thermal modes [4].”
Gallium Nitride as an Electromechanical Material (2014, background): “Pure screw-type threading dislocation densities of less than 107 cm−2 can be obtained for GaN-on-Si substrates [77], [78].”
Temperature Dependence of Quality Factor in MEMS Resonators (2006, unknown): “For such analysis, numerical simulation tools are required to estimate the exact energy loss [19].”
MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “A fully coupled thermomechanical model in both two and three dimensions in a solid has been presented in [169].”
Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction (2008, methodology): “complex geometries, numerical analysis using the method of finite elements is necessary to compute TED [20], [36].”