Design of large deflection electrostatic actuators

By J. Grade, H. Jerman, Thomas W. Kenny. 2003

236 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/d83b04dd85a7478e02d53bb941105af88913bb7c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Werayut Srituravanich
2. Alongkorn Pimpin
3. Khadijah A Altammar

In Electrical and Electronic Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin

Citations in the corpus

• Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “There are numerous MEMS devices around us such as micro accelerometers [45, 46], DMD [45, 47, 48], MEMS pressure sensors [49, 50], micropumps [58-60], microvalves [61], optical switches [62, 63], inkjet heads, microgrippers [64, 65], and microactuators [66-70].”