Temperature Dependence of Quality Factor in MEMS Resonators

By Bongsang Kim, C. Jha, Taylor White, Rob N. Candler, Matt Hopcroft, M. Agarwal, K. Park, R. Melamud, Saurabh A. Chandorkar, Thomas W. Kenny. Journal of microelectromechanical systems, 2006

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Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing (2013, background): “For the thermoelastic dissipation, with the associated strong 1/T 3 temperature dependency [16], the Q-factor sensitivity is the primary factor that contributes to the scale-factor fluctuations (10,000 ppm/°C).”
Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop (2010, methodology): “TED was identified as the resonators’ dominant energy-loss mechanism by comparing the temperature dependence of the resonators’ quality factors to TED theory [21].”
What is the Young's Modulus of Silicon? (2010, methodology): “Let us consider a recently published MEMS resonator design as an example of elasticity calculations [41], [42].”
MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “For MEMS resonators, Qair is commonly inversely proportional to the operating pressure and proportional to the resonant frequency [144], [150], [174].”
A review of MEMS oscillators for frequency reference and timing applications (2011, background): “It is also predicted that the f · Q product exhibits a strong temperature dependence [154].”