Limits of quality factor in bulk-mode micromechanical resonators
By Saurabh A. Chandorkar, M. Agarwal, R. Melamud, Rob N. Candler, Kenneth E. Goodson, Thomas W. Kenny. 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008
171 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/aa1813b2d3c0df2e46440a2522c7c5b88a5d1eb6
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In Atomic and Molecular Physics, and Optics
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Citations in the corpus
- Effect of phonon interactions on limiting the f.Q product of micromechanical resonators (2009, background): “Several dissipative mechanisms limit the Q of an electromechanical resonator [1], [2], [3].”
- Gallium Nitride as an Electromechanical Material (2014, background): “the thermoelastic damping is not significant [122], however, it is generally a dominant damping mechanism for lowerfrequency flexural-mode resonators [123], [124].”
- Temperature Dependence of the Elastic Constants of Doped Silicon (2015, background): “The Q for most of these resonators are known to be limited by thermoelastic dissipation [29]–[31], but could also be limited by the Akhieser effect [32] for the Lamé modes without release-etch holes.”
- MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “Phonon-phonon interactions can be divided into two main regimes, namely Akhieser and Landau-Rumer regimes [36], [145].”
- Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering (2013, background): “LN material is theoretically predicted [38] and experimentally verified to have very low intrinsic acoustic loss [6].”