1/f noise considerations for the design and process optimization of piezoresistive cantilevers

By J. Harley, Thomas W. Kenny. Journal of microelectromechanical systems, 2000

243 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/7439a643419b05778cb2449771f07fd8663b8e91

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In Atomic and Molecular Physics, and Optics

  1. Woo-Tae Park

In Electrical and Electronic Engineering

  1. Woo-Tae Park

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