Temperature-Insensitive Composite Micromechanical Resonators

By R. Melamud, Saurabh A. Chandorkar, Bongsang Kim, H. Lee, J. Salvia, Gaurav Bahl, Matt Hopcroft, Thomas W. Kenny. Journal of microelectromechanical systems, 2009

164 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/bda59d970669193a854d7ab54a7caebd82ac3968

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Eldwin Jiaqiang Ng
2. Wen Chen
3. Jinghui Xu
4. Guoqiang Wu
5. Yushi Yang
6. V. Hong
7. C. Ahn
8. Camille L. M. Everhart

In Biomedical Engineering

1. Eldwin Jiaqiang Ng
2. Wen Chen
3. Jinghui Xu
4. Guoqiang Wu
5. Robert Puers
6. J.T.M. van Beek
7. Thomas W. Kenny

In Electrical and Electronic Engineering

1. Eldwin Jiaqiang Ng
2. Wen Chen
3. Jinghui Xu
4. Guoqiang Wu
5. Yushi Yang
6. V. Hong
7. C. Ahn
8. Camille L. M. Everhart

Citations in the corpus

• A review of MEMS oscillators for frequency reference and timing applications (2011, background): “Therefore, the charging effect might also have consequences for the aging behavior of the resonator when a bias voltage is applied to the resonator over prolonged periods of time [195].”
• Temperature Dependence of the Elastic Constants of Doped Silicon (2015, methodology): “Many methods have been employed to compensate for this temperature dependence, such as using a composite siliconsilicon dioxide structure [7]–[9], or an active phase-locked”
• MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “charge due to the coated SiO2 could result in significant frequency drifts over time [192], [205].”