Markus Lutz

Electrical and Electronic Engineering · 2003–2006

A researcher in the Science corpus: 3 papers; trusts 1 researcher and is trusted by 0 researchers here, as inferred from the citation graph.

Subfields

Whom Markus Lutz trusts

Their strongest outbound trust, strongest first, inferred from their citations.

  1. Liwei Lin (in Electrical and Electronic Engineering)

Papers from Markus Lutz's perspective

Ordered by how strongly the researchers Markus Lutz trusts endorse each paper. Same corpus, a different order for every researcher.

  1. MEMS post-packaging by localized heating and bonding
  2. Vacuum packaging technology using localized aluminum/silicon-to-glass bonding (Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090))
  3. A 12 MHz micromechanical bulk acoustic mode oscillator
  4. Single wafer encapsulation of MEMS devices
  5. A high-performance planar piezoresistive accelerometer (Journal of microelectromechanical systems)
  6. Thermal conduction in doped single-crystal silicon films
  7. Engineering MEMS Resonators With Low Thermoelastic Damping (Journal of microelectromechanical systems)
  8. Quality factors in micron- and submicron-thick cantilevers (Journal of microelectromechanical systems)
  9. Thermoelastic damping in fine-grained polysilicon flexural beam resonators
  10. Micromechanical "hollow-disk" ring resonators (17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest)

Their papers