Thermoelastic damping in fine-grained polysilicon flexural beam resonators

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Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction (2008, background): “Subsequent studies have confirmed that TED contributes significantly to damping in both single-crystal [6], [7] and polycrystalline [8], [9] silicon, poly-SiGe [10], and silicon nitride [11].”
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams (2006, background): “have occurred since [4-7], including investigations of ring-shaped resonators [8] and extraction of the flexural component of arbitrary mechanical modes to determine the”
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, unknown): “ment (see, for example, [15–27]).”
Elastic PMLs for resonator anchor loss simulation (2005, background): “Thermoelastic damping is a frequentlycited source of losses at high frequencies [17, 21, 1, 23, 29].”
Gallium Nitride as an Electromechanical Material (2014, background): “the thermoelastic damping is not significant [122], however, it is generally a dominant damping mechanism for lowerfrequency flexural-mode resonators [123], [124].”