Micromechanical "hollow-disk" ring resonators

By Sheng-Shian Li, Yu-Wei Lin, Yuan Xie, Z. Ren, C. T. Nguyen. 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 2004

173 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/bf721242464cbf551548c18d6f364445f1d7f9db

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In Atomic and Molecular Physics, and Optics

In Biomedical Engineering

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Citations in the corpus

MEMS technology for timing and frequency control (2005, background): “In particular, vibrating micromechanical resonator devices based on silicon micromachining technologies have now been demonstrated with on-chip Q’s greater than 10,000 at GHz frequencies [6], [7], frequencyQ products exceeding 2.”
MEMS technology for timing and frequency control (2005, background): “2 GHz, which is the highest Q to date past 1 GHz for any on-chip resonator at room temperature [4][23][24].”
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams (2006, background): “Clamping loss in micromechanical resonators is an area that has been receiving an increasing amount of attention [14-18], but it is still not fully understood.”
Series-resonant VHF micromechanical resonator reference oscillators (2004, background): “For this reason, recent efforts to miniaturize and integrate the reference oscillator function have focused on micromachined vibrating resonators as potential replacements for the high and temperature stable, but bulky, quartz crystals that presently govern reference oscillator phase noise…”
Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics (2012, methodology): “To realize GHz mechanical resonances, we focus on the radial-contour modes of ring resonators with a geometry similar to electrostatically actuated ‘hollow-disc’ resonators [47].”
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators (2006, background): “Furthermore, recent efforts [5]–[8] trying to act on geometrical parameters, such as the effective actuation area, in order to reduce the equivalent”
MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “The first step is to minimize the mechanical vibration propagating into the substrate, such as anchoring the resonator with tethers at its nodal or quasi-nodal points [123], [152]–[154].”