Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction

By S. Prabhakar, S. Vengallatore. Journal of microelectromechanical systems, 2008

157 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/3ebee8d27521a93b75fb0906abb383677d35d099