Siavash Pourkamali
Atomic and Molecular Physics, and Optics · 2003
A researcher in the Science corpus: 1 paper; trusts 2 researchers and is trusted by 0 researchers here, as inferred from the citation graph.
Subfields
- Atomic and Molecular Physics, and Optics — 5 citations into it
- Electrical and Electronic Engineering — 5 citations into it
Whom Siavash Pourkamali trusts overall
Their strongest outbound trust, strongest first, inferred from their citations.
Papers from Siavash Pourkamali's perspective
Ordered by how strongly the researchers Siavash Pourkamali trusts endorse each paper. Same corpus, a different order for every researcher.
- High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology (Journal of microelectromechanical systems)
- Thermal conduction in doped single-crystal silicon films
- A HARPSS polysilicon vibrating ring gyroscope
- Elastic Wave Transmission at an Abrupt Junction in a Thin Plate, with Application to Heat Transport and Vibrations in Mesoscopic Systems
- An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations
- High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps
- A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes (Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291))
- Silicon micromachining using a high-density plasma source
- Vacuum packaging technology using localized aluminum/silicon-to-glass bonding (Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090))
- MEMS post-packaging by localized heating and bonding