A HARPSS polysilicon vibrating ring gyroscope
By Farrokh Ayazi, Khalil Najafi. 2001
400 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/435de24481a0f295f708494ea3a3c770159bea8e
How researchers see this paper
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In Atomic and Molecular Physics, and Optics
- Reza Abdolvand
- Ahmet Erbil
- Gavin K. Ho
- Siavash Pourkamali
- A. Hashimura
- Farrokh Ayazi
- Yipeng Lu
- David A. Horsley
In Biomedical Engineering
In Electrical and Electronic Engineering
- Reza Abdolvand
- Ahmet Erbil
- Gavin K. Ho
- Siavash Pourkamali
- A. Hashimura
- Farrokh Ayazi
- Yipeng Lu
- David A. Horsley
Citations in the corpus
- High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps (2003, methodology): “An enhanced and modified version of the HARPSS (High Aspect Ratio combined Poly and Single crystal Silicon) process [13], [14] has been used in this work to fabricate 10’s”
- Electrostatic correction of structural imperfections present in a microring gyroscope (2005, background): “As these electrodes are normally formed from the same deposition step [5] or from the same substrate material as the ring [6], the electrode thickness is equal to that of the ring.”
- A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability (2008, background): “Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org.”