A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes

By Y. Mochida, Masaya Tamura, Kuniki Ohwada. Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), 2000

170 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/e92985d247b9f2685b226baef9828226057b5987

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Carlo Edoardo Campanella
2. Vittorio M. N. Passaro
3. Farrokh Ayazi
4. S. E. Alper
5. Antonello Cuccovillo

In Biomedical Engineering

1. Vittorio M. N. Passaro
2. Farrokh Ayazi
3. S. E. Alper

In Electrical and Electronic Engineering

1. Carlo Edoardo Campanella
2. Vittorio M. N. Passaro
3. Farrokh Ayazi
4. S. E. Alper
5. Antonello Cuccovillo

Citations in the corpus

• A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability (2008, background): “M. F. Zaman was with the School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250 USA.”
• Gyroscope Technology and Applications: A Review in the Industrial Perspective (2017, background): “This performance resulted to be better than that related to the reference device, due to weak coupling between the two modes [48].”
• A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate (2005, background): “This can be easily achieved by having symmetric suspensions for both modes; however, structures having symmetric suspensions are usually subject to unstable operation and high bias drift due to mechanical coupling between the drive and sense modes [2].”