High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps
By Siavash Pourkamali, A. Hashimura, Reza Abdolvand, Gavin K. Ho, Ahmet Erbil, Farrokh Ayazi. 2003
184 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/73058575a3cbba6bbb2f821e8df840254d6fdb0a
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Atomic and Molecular Physics, and Optics
- Reza Abdolvand
- Ahmet Erbil
- Gavin K. Ho
- Masayoshi Esashi
- Wen Chen
- Farrokh Ayazi
- Eldwin Jiaqiang Ng
- Jinghui Xu
In Biomedical Engineering
- Reza Abdolvand
- Wen Chen
- Farrokh Ayazi
- Eldwin Jiaqiang Ng
- Jinghui Xu
- Guoqiang Wu
- Chih-Kung Lee
- Yipeng Lu
In Electrical and Electronic Engineering
- Reza Abdolvand
- Ahmet Erbil
- Gavin K. Ho
- Masayoshi Esashi
- Wen Chen
- Farrokh Ayazi
- Eldwin Jiaqiang Ng
- Jinghui Xu
Citations in the corpus
- Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures (2005, background): “The wafers for DRIE were single crystal silicon, 〈1 0 0〉, had a thickness of 625 µm, and were p-type, with resistivity 2–6 cm.”
- MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “Cavity-silicon-on-insulator (CSOI)-based processes [111], [112], and High Aspect-Ratio combined Poly and Singlecrystal Silicon (HARPSS) technologies [47], [72], [113],”
- An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations (2003, background): “Keywords: Support loss; Beam resonator; Quality factor; Micromachining; Elastic wave; Flexural vibration”
- Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators (2008, background): “Demonstrations of capacitive resonators with high Q are common [1], [2].”