High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology

By Farrokh Ayazi, Khalil Najafi. Journal of microelectromechanical systems, 2000

180 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/02d3a674308397877dc0495eba6a2a11d51507ca

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Farrokh Ayazi
2. Reza Abdolvand
3. Ahmet Erbil
4. Gavin K. Ho
5. Siavash Pourkamali
6. A. Hashimura
7. J. Schroers
8. Khalil Najafi

In Electrical and Electronic Engineering

1. Farrokh Ayazi
2. Reza Abdolvand
3. Ahmet Erbil
4. Gavin K. Ho
5. Siavash Pourkamali
6. A. Hashimura
7. Khalil Najafi
8. J. Schroers

Citations in the corpus

• A HARPSS polysilicon vibrating ring gyroscope (2001, methodology): “Since the Brownian and the electronic noise are uncorrelated, the overall noise floor of the gyroscope is then given by (20)”
• High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps (2003, methodology): “An enhanced and modified version of the HARPSS (High Aspect Ratio combined Poly and Single crystal Silicon) process [13], [14] has been used in this work to fabricate 10’s”
• Thermoplastic Forming of Bulk Metallic Glass— A Technology for MEMS and Microstructure Fabrication (2007, background): “MEMS have enabled sensing and actuation in many diverse areas such as space-based thrusters [1], [2], DNA chips [3], radio-frequency (RF) MEMS [4], gyroscopes [ 5 ], digital projectors [6], and in-vivo biological applications [7].”