An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations
By Z. Hao, Ahmet Erbil, Farrokh Ayazi. 2003
414 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/21313c11953983426ee1a0a600dcb0ec3bfe787a
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- MEMS Resonators for Frequency Reference and Timing Applications (2020, neutral): “strate, resulting in energy dissipation [149]–[151].”
- Effect of phonon interactions on limiting the f.Q product of micromechanical resonators (2009, background): “Among those, some can be suppressed and even eliminated through proper design (e.g. clamping loss [3]).”
- Dissipation in nanoelectromechanical systems (2014, background): “[120] that, cantilevers suffer from less clamping losses than doubly-clamped beams.”
- Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers (2015, methodology): “1 μm PZT), as expected from theory [26], [27]:”
- A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability (2008, background): “(1) Among them, the effect of air damping may be eliminated by operating the gyroscope in vacuum, while the contribution of”