Stephen D. Senturia
2000–2002
A researcher in the Science corpus: 3 papers; trusts 1 researcher and is trusted by 27 researchers here, as inferred from the citation graph.
Whom Stephen D. Senturia trusts overall
Their strongest outbound trust, strongest first, inferred from their citations.
Who trusts Stephen D. Senturia overall
- Ira O. Wygant
- M. D. Williams
- Bekir Akgöz
- V. T. Srikar
- Dongyun Lee
- Mario Kupnik
- A. Epstein
- Ö. Civalek
- Zhong-Zhi Bai
- Benjamin A. Griffin
Papers from Stephen D. Senturia's perspective
Ordered by how strongly the researchers Stephen D. Senturia trusts endorse each paper. Same corpus, a different order for every researcher.
- VHF free-free beam high-Q micromechanical resonators (Journal of microelectromechanical systems)
- An Introduction to Microelectromechanical Systems Engineering
- Stress Waves in Solids
- MEMS reliability in shock environments (2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059))
- Advances in telecom and datacom optical components
- Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer
- Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS
- IC-Compatible Polysilicon Surface Micromachining
- Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS
- The impact of solution agglomeration on the deposition of self-assembled monolayers
Their papers
- Thermoelastic damping in fine-grained polysilicon flexural beam resonators (2002) — 139 citations
- The reliability of microelectromechanical systems (MEMS) in shock environments (2002) — 229 citations
- Microsystem Design (2000) — 1,995 citations