IC-Compatible Polysilicon Surface Micromachining

By J. Sniegowski, M. P. Boer. 2000

242 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/d5dd7b52510d5b77c7645f735369b15bd641b87e

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Roya Maboudian
2. W. Ashurst
3. J. Krim
4. Nathan D. Masters
5. Larry L. Howell

In Biomedical Engineering

1. J. Krim

In Electrical and Electronic Engineering

1. Roya Maboudian
2. W. Ashurst
3. J. Krim
4. Nathan D. Masters
5. Larry L. Howell

Citations in the corpus

• Friction and energy dissipation mechanisms in adsorbed molecules and molecularly thin films (2012, methodology): “Multi-level MEMS Technology 5 (SUMMiT V) fabrication process [290] and consists of a primary, or “main” shuttle for generating tangential (sliding) motion and two additional loading shuttles for applying a normal force at the sidewall surface of the main shuttle.”
• High-performance surface-micromachined inchworm actuator (2003, methodology): “The devices were fabricated according to the standard SUMMiT V process flow [14].”