MEMS reliability in shock environments

By D. Tanner, J. Walraven, Karen S. Helgesen, L. W. Irwin, F. Brown, N. F. Smith, Nathan Masters Sandia. 2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059), 2000

185 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/777bdbe59967d3dc3bc4590a54c1d94024670621

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In Atomic and Molecular Physics, and Optics

1. Stephen D. Senturia
2. V. T. Srikar

In Electrical and Electronic Engineering

1. Stephen D. Senturia
2. V. T. Srikar

Citations in the corpus

• Vibration and shock reliability of MEMS: modeling and experimental validation (2011, unknown): “There have also been various attempts to study the shock and vibration reliability of particular MEMS devices at Sandia National Laboratories [14, 15] and at other laboratories [16].”
• The reliability of microelectromechanical systems (MEMS) in shock environments (2002, methodology): “Microsystems fail in shock environments either when a critical stress is exceeded (fracture [3], [7], [8] and delamination”