Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

By W. Ashurst, Christina Yau, Carlo Carraro, Roya Maboudian, M. Dugger. 2001

181 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/b07bba4b204340c5678356c63d7a5cd388b3c700

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Nathan D. Masters
2. Larry L. Howell
3. Roya Maboudian
4. W. Ashurst
5. J. Krim
6. S. J. Seltzer
7. Makoto Ohsaki
8. Shinji Nishiwaki

In Electrical and Electronic Engineering

1. Nathan D. Masters
2. Larry L. Howell
3. Roya Maboudian
4. W. Ashurst
5. J. Krim
6. S. J. Seltzer

In Mechanics of Materials

1. Nathan D. Masters
2. Larry L. Howell
3. J. Krim

Citations in the corpus

• Friction and energy dissipation mechanisms in adsorbed molecules and molecularly thin films (2012, background): “The majority of the nanotribological studies have been performed on hydrocarbon SAM layers 93 94 , 584–593 .”
• A self-retracting fully compliant bistable micromechanism (2003, methodology): “Several methods have been developed to minimize stiction including Self Assembling Monolayers (SAM) coatings of organic, hydrophobic chemicals [40, 1, 30], and supercritical carbon dioxide drying.”
• High-performance surface-micromachined inchworm actuator (2003, methodology): “Third, dichlorodimethylsilane (DDMS) [ 21 ] was applied in the vapor phase following supercritical drying [22], [23].”
• Developments in alkali -metal atomic magnetometry (2008, background): “, 1998) and as an anti-stiction coating for microelectronic devices (Maboudian et al., 2000; Ashurst et al., 2001).”