Microsystem Design
By Stephen D. Senturia. 2000
1,995 citations recorded by the source corpus.
Subfields: Geophysics, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/1d90ecf5710e917b53b175b864faa16940b779eb
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Geophysics
- Ö. Civalek
- Bekir Akgöz
- Butrus T. Khuri-Yakub
- Ira O. Wygant
- Mario Kupnik
- Mark Sheplak
- V. T. Srikar
- Benjamin A. Griffin
In Mechanics of Materials
- Bekir Akgöz
- Ö. Civalek
- Jerome P. Lynch
- Manhong Zhao
- Butrus T. Khuri-Yakub
- Ira O. Wygant
- Mario Kupnik
- Mark Sheplak
Citations in the corpus
- Review: Semiconductor Piezoresistance for Microsystems (2009, background): “Generic signal conditioning circuitry consists of an excitation circuit, a bridge circuit, an amplifier, and a filter [51].”
- Feedback Systems: An Introduction for Scientists and Engineers (2008, neutral): “Models of dynamics have been developed in many different fields, including mechanics [Gol53], heat conduction [CJ59], fluids![BS60], vehicles [Abk69, Bla91, Ell94], circuit theory [Gui63], acoustics [Ber54] and micromechanical systems [Sen01].”
- Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell (2008, methodology): “To derive the model, we define the standard two-port model [5].”
- Elastic PMLs for resonator anchor loss simulation (2005, neutral): “where ω is the computed eigenvalue [27].”
- A batch fabricated biomimetic dry adhesive (2005, background): “(Some figures in this article are in colour only in the electronic version)”
- The reliability of microelectromechanical systems (MEMS) in shock environments (2002, background): “7 in the wet-etched structure, and at an angle near 90 in the DRIE (or wafer-bonded) structure, respectively [1], [2].”