VHF free-free beam high-Q micromechanical resonators

By Kun Wang, Yinglei, Ark-Chew Wong, Clark, Nguyen. Journal of microelectromechanical systems, 2000

432 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6cb89f07fd494dc49216b2541ee65ef12f94b066

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

Citations in the corpus

Thermoelastic damping in fine-grained polysilicon flexural beam resonators (2002, background): “It is interesting to observe from Fig. 4 that the frequency dependence of the damping in these resonators agrees with thermoelastic damping; however, the measured damping values are 2 . This difference cannot be solely attributed to a 10 variation in the value . iii) The structures of Wang et al. [ ”
RF MEMS from a device perspective (2000, methodology): “An alternative resonator design using a free–free beam structure has been demonstrated [90].”
MEMS technology for timing and frequency control (2005, background): “statically or piezoelectrically rather than plucking it, one can achieve a free-free beam (“FF-beam) resonator such as summarized in row 2 of Table 1 that resonates at frequencies around 100 MHz with Q’s in excess of 10,000 [16][19].”
High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps (2003, neutral): “Surface micromachined polysilicon capacitive resonators with submicron gap spacing have been demonstrated [3], [4].”
Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance (2003, background): “This measurement also shows that corner-supported square plates exhibit almost 2X larger ’s compared to center-anchored square plates, as well as free-free beam micromechanical resonators [17], at the same frequency.”
MEMS technology for timing and frequency control (2005, background): “In particular, by shrinking a guitar string from 25′′ down to only 10 μm, constructing it in stiffer, IC-compatible materials (such as polysilicon), supporting it at nodes rather than at its ends (to minimize anchor losses), and exciting it electrostatically or piezoelectrically rather than plucking”
High-Q UHF micromechanical radial-contour mode disk resonators (2005, methodology): “Index Terms—Electromechanical coupling, microelectromechanical systems (MEMS), microelectromechanical devices, microresonator, quality factor, resonator, UHF, VHF. NOMENCLATURE Empirical scaling factor for simplified resonance frequency calculations (dependent on the mode number).”
MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “popular processes reported in literature are surface micromachining [50], [108]–[110], Silicon-on-Insulator (SOI) &”
RF MEMS from a device perspective (2000, methodology): “An alternative resonator design using a free–free beam structure has been demonstrated [90].”
Micromechanical mixer-filters ("mixlers") (2004, background): “B. 325 Electrode-to-Resonator Gaps Because diffusion is difficult through small gaps for both reactants and etch byproducts [18], [19], release etch times for the 325 electrode-to-resonator gaps of this paper are much longer than for previous large-gapped surface micromachining processes.”