Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS

By W. Ashurst, Christina Yau, Carlo Carraro, Christina O. Lee, G. Kluth, R. Howe, Roya Maboudian. 2001

152 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c634b98ce77aea2f443da422325d4aa2566dbc15

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Roya Maboudian
2. W. Ashurst
3. Nathan D. Masters
4. Larry L. Howell

In Electrical and Electronic Engineering

1. Roya Maboudian
2. W. Ashurst
3. Carlo Carraro
4. Nathan D. Masters
5. Larry L. Howell

Citations in the corpus

• Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer (2001, background): “The OTS SAM has been shown to be stable in oxidizing ambients for temperatures up to 225 C, and microstructures that have undergone the OTS SAM treatment typically exhibit particles that arise from bulk polymerization of the precursor molecules [11].”
• High-performance surface-micromachined inchworm actuator (2003, methodology): “For octadecene, a value was previously measured on the sidewall structure [ 20 ], while we found .W e can only speculate on the reasons at this point.”