Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS

By B. Jensen, M. P. D. Boer, Nathan D. Masters, F. Bitsie, D. Laván. 2001

134 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/e412a88eb400501b2bc42b8ebd2e0c577b720d59

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Roya Maboudian
2. W. Ashurst
3. Nathan D. Masters
4. Larry L. Howell

In Electrical and Electronic Engineering

1. Roya Maboudian
2. W. Ashurst
3. Nathan D. Masters
4. Larry L. Howell

Citations in the corpus

• High-performance surface-micromachined inchworm actuator (2003, methodology): “Assuming Young’s Modulus for polysilicon [ 13 ] and a yield strength (from nanoindentation modeling of experimental data [29]), we plot the estimated contact parameters in Fig. 16. For parallel surfaces, the apparent contact pressure is the normal load divided by the nominal contact area.”