Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application

By D. Croft, G. Shedd, Santosh Devasia. Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334), 2000

819 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Control and Systems Engineering

View Paper: https://www.semanticscholar.org/paper/30d43dce3a0e6e2fe125673dff9759782a23040f

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Citations in the corpus

Feedforward control of piezoactuators in atomic force microscope systems (2009, methodology): “First, when the displacement range of the piezoactuator is within the linear range, hysteresis is negligible, and the output exhibits only linear dynamics [10].”
Modeling and control of hysteresis in magnetostrictive actuators (2004, methodology): “A popular phenomenological hysteresis model adopted for smart materials is the Preisach model (Adly, Mayergoyz & Bergqvis, 1991; Hughes & Wen, 1994; Ge & Jouaneh, 1996; Gorbet, Wang, & Morris, 1998; Cruz-Hernandez & Hayward, 2001; Tan, Venkataraman, & Krishnaprasad, 2001; Natale, Velardi, & Visone, ”
Design and input-shaping control of a novel scanner for high-speed atomic force microscopy (2008, methodology): “to speed up the AFM by focussing on the mechanical design [12], implementing multiple actuator systems [13], and by applying modern control methods [3,17,5,20].”
Design of hysteresis-compensating iterative learning control for piezo-positioners: Application to atomic force microscopes (2006, methodology): “The modeling process To isolate the hysteresis behavior, we need to account for creep and vibration effects [13,28].”
Design methodologies for robust nano-positioning (2005, background): “854336 in the open-loop implementation such as using ‘harder’ piezoceramics that have smaller nonlinear effects at the cost of travel range [13], replacing voltage control by charge control [14] which achieves lower hysteresis but leads to more creep, less travel and a lower positioning bandwidth; p”
A Survey of Control Issues in Nanopositioning (2007, methodology): “alleviated by using a linear creep model [34] discussed in the following.”
Integral Resonant Control of a Piezoelectric Tube Actuator for Fast Nanoscale Positioning (2008, neutral): “signals are used for actuating piezoelectric materials [14], [21].”
A New Scanning Method for Fast Atomic Force Microscopy (2011, background): “properties that are inherent to piezoelectric material, including hysteresis, creep, and drift [8], [9].”
Design and Modeling of a High-Speed AFM-Scanner (2007, background): “Aluminum is used as the center piece and flexure material and a steel base housing serves as a rigid support of the piezos and flexures.”
Bouc–Wen Modeling and Inverse Multiplicative Structure to Compensate Hysteresis Nonlinearity in Piezoelectric Actuators (2011, methodology): “Bouc-Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators”
Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms (2009, background): “Open-loop compensation for the vibration as well as nonlinearities in piezoelectric actuators has been proposed earlier [23].”
Design, Modeling, and FPAA-Based Control of a High-Speed Atomic Force Microscope Nanopositioner (2013, background): “Most literature involving nanopositioners, report the presence of nonminimum phase zeros [14], [43], [44].”
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, background): “The effectiveness of the model (4) described as linear transfer functions has been evidenced in [31], [35], [38].”
Multivariable classical Prandtl–Ishlinskii hysteresis modeling and compensation and sensorless control of a nonlinear 2-dof piezoactuator (2017, background): “Such combination, called Hammerstein scheme, is usual in monovariable (SISO) case [6,7,40], and is a very interesting feature to be developed for the multivariable (MIMO) case.”
Should model-based inverse inputs be used as feedforward under plant uncertainty? (2002, methodology): “The next condition specifies a bound on acceptable uncertainties which is used in following Lemmas when comparing the tracking performance with and without the inverse feedforward.”
Tracking control of a piezoceramic actuator with hysteresis compensation using inverse Preisach model (2005, methodology): “Most methods use the hysteresis model [3], [4], [19], [20], [22] or the inverse model [17], in addition to the feedback control portion, in their control design.”