Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
By Guoying Gu, Limin Zhu, Chun-Yi Su, Han Ding, Sergej Fatikow. IEEE Transactions on Automation Science and Engineering, 2016
567 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Control and Systems Engineering
View Paper: https://www.semanticscholar.org/paper/5b7fcc94859576b8770790635e6906d0a658afef
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Control and Systems Engineering
Citations in the corpus
- Recent trends in piezoelectric actuators for precision motion and their applications: a review (2020, background): “Equations (1) and (2) represent the electromechanical coupling of the piezoelectric materials in the form of constitutive expressions [32].”
- Continuous Integral Terminal Third-Order Sliding Mode Motion Control for Piezoelectric Nanopositioning System (2017, background): “A state-of-the-art survey is presented in recent work [9].”