Design and Modeling of a High-Speed AFM-Scanner

By Georg Schitter, K. Åström, B. DeMartini, Philipp J. Thurner, Kimberly L. Turner, Paul K. Hansma. IEEE Transactions on Control Systems Technology, 2007

375 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Control and Systems Engineering

View Paper: https://www.semanticscholar.org/paper/1f86be96d22a8aad4acfe5985ca48c3b964f58b3

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In Atomic and Molecular Physics, and Optics

In Biomedical Engineering

In Control and Systems Engineering

Citations in the corpus

High-resolution atomic force microscopy and spectroscopy of native membrane proteins (2011, background): “The Hansma group developed a variety of different components for high-speed AFM such as high-resonance frequency scanners [40, 41, 45, 46], soft small cantilevers exhibiting high resonance frequencies [45], fast data acquisition devices [45, 47] and optical deflection detection systems [35].”
Feedforward control of piezoactuators in atomic force microscope systems (2009, background): “Another approach for improving the operating speed of the AFM is to use stiffer piezoactuators that have higher resonance frequencies [7], [11].”
Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning (2009, background): “reported in [15], where the stage has a relatively small travel range of approximately 10 μm along the X- and Y -axes, but a high first resonant mode of about 20 kHz for both axes.”
Feedback Systems: An Introduction for Scientists and Engineers (2008, neutral): “Here we will discuss a high performance system from [168] where the cantilever base is positioned vertically using a piezo stack.”
Design and input-shaping control of a novel scanner for high-speed atomic force microscopy (2008, background): “The first resonant mode in the Z-direction is predicted to occur at 33 kHz [21].”
Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing (2011, background): “[20] developed a high-speed scanner based on compact flexures and actuated”