Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms

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Design of a Large Range XY Nanopositioning System (2010, background): “…is based on a parallel-kinematic XY flexure mechanism that provides a high degree of geometric decoupling between the two motion axes by avoiding geometric over-constraint, provides actuator isolation that allows the use of large-stroke single-axis actuators, and enables a complementary…”
Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning (2009, unknown): “earlier [30].”
Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control (2010, methodology): “A number of techniques for damping control have been demonstrated successfully in the literature, these include positive position feedback (PPF) [21], polynomial based control [20], shunt control [22], [23], resonant control [24], and integral resonant control (IRC) [19], [25], [26].”
Integral Resonant Control of a Piezoelectric Tube Actuator for Fast Nanoscale Positioning (2008, background): “This has been done by several authors in different contexts [1], [3], [7], [8], [12], [22], [30], [32], [33], [37].”
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, background): “In the literature, positive position or velocity feedback [57], [190], polynomial-based controller [190], delayed resonant control [191] and integral resonant control [149] have been developed.”