Feedforward control of piezoactuators in atomic force microscope systems

By Kam K. Leang, Qingze Zou, Santosh Devasia. IEEE Control Systems, 2009

271 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/373a3ffe29d482bc478b494468051739d8b5ce4b

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Chun-Yi Su
2. Brian J. Kenton
3. Andrew J. Fleming
4. Guoying Gu
5. Limin Zhu
6. Kam K. Leang
7. S. O. Reza Moheimani

In Control and Systems Engineering

1. Limin Zhu
2. Guoying Gu
3. Chun-Yi Su
4. Brian J. Kenton
5. Andrew J. Fleming
6. Kam K. Leang
7. Mou Chen
8. Shuzhi Sam Ge

In Materials Chemistry

1. Guoying Gu
2. Limin Zhu
3. Chun-Yi Su
4. Andrew J. Fleming
5. Brian J. Kenton
6. Kam K. Leang

Citations in the corpus

• Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner (2012, background): “Model-based feedforward control is effective at compensating for both hysteresis and dynamic effects at high scan frequencies [2], [25].”
• Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, unknown): “Adapted from [51].”
• Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control (2010, background): “11 can be used to improve the closed-loop response of the system [29].”
• Modeling and Compensation of Asymmetric Hysteresis Nonlinearity for Piezoceramic Actuators With a Modified Prandtl–Ishlinskii Model (2014, methodology): “Feedforward control is the most common used approach [10], [11].”