Design methodologies for robust nano-positioning

By Abu Sebastian, S. Salapaka. IEEE Transactions on Control Systems Technology, 2005

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Adaptive Sliding Mode Control With Perturbation Estimation and PID Sliding Surface for Motion Tracking of a Piezo-Driven Micromanipulator (2010, methodology): “Additionally, taking into account that modeling the hysteresis is a complicated procedure, some approaches based on plant model identification without the consideration of hysteresis have been exploited in terms of PID (proportional-integral-derivative) control [6], robust control [7]–[10], and inve”
A Survey of Control Issues in Nanopositioning (2007, methodology): “robust control techniques have been developed in [35]–[37], [101] and [102].”
Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning (2009, background): “ical design [13] and implementing various control algorithms on the systems [2], [14].”
Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms (2009, methodology): “Lower resolution due to fed-through noise is the main factor deeming the implementation of closed-loop nanopositioning schemes less common than the open-loop architectures [22].”
Design and Modeling of a High-Speed AFM-Scanner (2007, methodology): “The dynamics of piezo positioners have been determined by physical modeling using partial differential equations [30], system identification [7], and frequency response [18], [ 20 ].”