A Survey of Control Issues in Nanopositioning

By Santosh Devasia, Evangelos Eleftheriou, S. O. Reza Moheimani. IEEE Transactions on Control Systems Technology, 2007

1,092 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Control and Systems Engineering

View Paper: https://www.semanticscholar.org/paper/7cf8c7d6f6432da791e1235e76d295e3203a6b14

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In Atomic and Molecular Physics, and Optics

In Biomedical Engineering

In Control and Systems Engineering

Citations in the corpus

Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation (2013, background): “of the power driver and the cost of such techniques [1].”
A New Scanning Method for Fast Atomic Force Microscopy (2011, background): “An exhaustive review of the literature can be found in [9].”
Integral Resonant Control of a Piezoelectric Tube Actuator for Fast Nanoscale Positioning (2008, background): “Good illustrations of the tube can be found in [5], [10], [18], and [12].”
Adaptive Sliding Mode Control With Perturbation Estimation and PID Sliding Surface for Motion Tracking of a Piezo-Driven Micromanipulator (2010, background): “The successful compensation for hysteresis relies on the design of suitable control strategies [2].”
Modeling and Compensation of Asymmetric Hysteresis Nonlinearity for Piezoceramic Actuators With a Modified Prandtl–Ishlinskii Model (2014, methodology): “Compared with the capacitive sensor and linear variable differential transformer sensor, the SGS is a contact type sensor, which offers high resolution and bandwidth [1], [40].”
A review of nanometer resolution position sensors: Operation and performance (2013, background): “The most commonly used sensors in nanopositioning sysems [8] are the capacitive and eddy-current sensors discussed n Sections 3.”
Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control (2010, methodology): “The positioning accuracy of piezoelectric actuators is however severely limited by hysteresis over large displacements, and creep at low frequencies [1].”
Multivariable classical Prandtl–Ishlinskii hysteresis modeling and compensation and sensorless control of a nonlinear 2-dof piezoactuator (2017, background): “To reduce this difficulty, it is often admitted in piezoelectric actuators that the model Γ(u(t), t) can be separated into a rate-independent hysteresis operator Γ(u(t)) cascaded with a linear dynamics [2,6,7].”
A New Method for Robust Damping and Tracking Control of Scanning Probe Microscope Positioning Stages (2010, background): “In addition to feedback control, feedforward or inversion based control had been proposed for both open- and closed-loop nanopositioning systems [25], [26].”
Design of a Large Range XY Nanopositioning System (2010, background): “Practical limitations associated with the individual physical components (bearing, actuators, and sensors) and their integration, particularly in the case of multi-axis systems, have restricted the range of currently available nanopositioning systems to approximately 100µm per axis.”
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, background): “However, it must not be confused with " delay " or " phase lag, " which is not a hard nonlinearity and is present in many linear systems [18].”