Energy dissipation in submicrometer thick single-crystal silicon cantilevers

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Progress in semiconductor diamond photodetectors and MEMS sensors (2021, background): “A key point is that the Q factor of the SCD cantilever fabricated by the smart-cut method is limited by the bulk defects or surface effect dissipation induced by ion implantation [122,123].”
An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations (2003, unknown): “F) and clamped–clamped (C–”
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams (2006, background): “Clamping loss in micromechanical resonators is an area that has been receiving an increasing amount of attention [14]–[18], but it is still not fully understood.”
Temperature Dependence of Quality Factor in MEMS Resonators (2006, unknown): “Surface loss is another known energy loss mechanism in microscale resonators [25], [26], [29]–[31].”