Elastic PMLs for resonator anchor loss simulation

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Explicit finite element perfectly matched layer for transient three‐dimensional elastic waves (2009, background): “This paper presents only a brief description of the concept of a PML because detailed development and derivations have been presented earlier [35, 36, 48].”
In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators (2011, methodology): “The PML was initially applied to electromagnetic problems [37] but has been extended to elastic structures and previously used to characterize out-ofplane anchor loss in a disk resonator [10].”
Engineering MEMS Resonators With Low Thermoelastic Damping (2006, methodology): “It is a useful tool for determining whether TED limits performance or whether other damping mechanisms, such as anchor damping [23], should be investigated instead.”