Nonlinear damping in a micromechanical oscillator
By Stav Zaitsev, Oleg Shtempluck, Eyal Buks, Oded Gottlieb. 2009
212 citations recorded by the source corpus.
Nonlinear elastic effects play an important role in the dynamics of microelectromechanical systems (MEMS). A Duffing oscillator is widely used as an archetypical model of mechanical resonators with nonlinear elastic behavior. In contrast, nonlinear dissipation effects in micromechanical oscillators are often overlooked. In this work, we consider a doubly clamped micromechanical beam oscillator, which exhibits nonlinearity in both elastic and dissipative properties. The dynamics of the oscillator is measured in both frequency and time domains and compared to theoretical predictions based on a Duffing-like model with nonlinear dissipation. We especially focus on the behavior of the system near bifurcation points. The results show that nonlinear dissipation can have a significant impact on the dynamics of micromechanical systems. To account for the results, we have developed a continuous model of a geometrically nonlinear beam-string with a linear Voigt–Kelvin viscoelastic constitutive law, which shows a relation between linear and nonlinear damping. However, the experimental results suggest that this model alone cannot fully account for all the experimentally observed nonlinear dissipation, and that additional nonlinear dissipative processes exist in our devices.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/3c8caeaf4f7c06628cea59a16749c164d3d08c0d
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- Dissipation in nanoelectromechanical systems (2014, background): “Nonlinear effects have been observed in NEMS devices [255], and it is proposed that nonlinearities due to geometry may also result in nonlinear dissipation [256]; however, such mechanisms are still unknown.”