Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

By V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, Heikki Seppä. IEEE Electron Device Letters, 2004

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In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators (2011, background): “stability in oscillator circuits [7], improved resolution in”
What is the Young's Modulus of Silicon? (2010, background): “Another example is the strain in a square block compressed equally on all sides (see, e.g., [ 29 ]).”
Nonlinear limits for single-crystal silicon microresonators (2004, background): “9 shows measured single-sideband (SSB) phase noise to carrier ratio for a test oscillator based on the plate resonator [19].”
MEMS technology for timing and frequency control (2005, background): “They have also been embedded into oscillator circuits to achieve phase noise performance satisfying global systems for mobile communications (GSM) specifications for reference oscillators [11]–[13].”
MEMS technology for timing and frequency control (2005, background): “They have also been embedded into oscillator circuits to achieve phase noise performance satisfying GSM specifications for reference oscillators [8][9].”