Nonlinear limits for single-crystal silicon microresonators
By V. Kaajakari, T. Mattila, A. Oja, Heikki Seppä. Journal of microelectromechanical systems, 2004
405 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/c1f4e13326d559f576e437b46339eed1d0c6d05a
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In Atomic and Molecular Physics, and Optics
- H. Nijmeijer
- Steven W. Shaw
- Reza Abdolvand
- Gavin K. Ho
- David A. Horsley
- Kimberly L. Turner
- Jeffrey F. Rhoads
In Biomedical Engineering
In Electrical and Electronic Engineering
- H. Nijmeijer
- Steven W. Shaw
- Reza Abdolvand
- Gavin K. Ho
- David A. Horsley
- Kimberly L. Turner
- Jeffrey F. Rhoads
Citations in the corpus
- In-Air Rangefinding With an AlN Piezoelectric Micromachined Ultrasound Transducer (2011, background): “The pMUT’s linear displacement range is a function of the membrane thickness [9], which can be increased at the cost of only a linear reduction in the electromechanical coupling factor.”
- Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators (2010, result): “[88], which examined the nonlinear response of silicon, bulk acoustic wave (BAW) resonators, demonstrating that these systems, in comparison to their flexural counterparts, had appreciably-higher energy storage capabilities; (ii) the 2005 work of Jeong and Ha [89], which developed a predictive model”
- Temperature Dependence of Quality Factor in MEMS Resonators (2006, neutral): “Although many aspects of performance have been investigated, such as temperature stability [3]–[6], long-term stability [7], [8], and nonlinearity [9], management, the control and utilization of the quality factor has remained an area for future work.”
- Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators (2008, background): “Reported ρW,max’s for bulk acoustic wave quartz crystal units and capacitive silicon micromechanical resonators are 190 J/m(3) and 180 kJ/m(3), respectively [10].”
- Modelling the dynamics of a MEMS resonator : simulations and experiments (2008, background): “[ 1 ,11]) and hardening geometric nonlinearities (mid-plane stretching of a clamped–clamped beam, see for instance refs.”