Modelling the dynamics of a MEMS resonator : simulations and experiments

By Rmc Rob Mestrom, Rhb Rob Fey, van Jtm Joost Beek, K. Phan, H. Nijmeijer. 2008

211 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/01c4bcf1ab20b03b5376b0da766f158dd399c162