High bandwidth nano-positioner: A robust control approach

By S. Salapaka, Abu Sebastian, J. Cleveland, M. Salapaka. 2002

438 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering

View Paper: https://www.semanticscholar.org/paper/53717c7ad0a8f203e0a05512c081aea37819e1ce

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In Atomic and Molecular Physics, and Optics

In Control and Systems Engineering

Citations in the corpus

Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation (2013, background): “Following the accumulated research results developed for PCA in [15], [16], and [17], a general schematic model of a piezoelectric positioning stage can be represented by Fig.”
Design and input-shaping control of a novel scanner for high-speed atomic force microscopy (2008, methodology): “to speed up the AFM by focussing on the mechanical design [12], implementing multiple actuator systems [13], and by applying modern control methods [3,17,5,20].”
A Free Energy Model for Hysteresis in Ferroelectric Materials (2003, background): “Robust control design can be used to extend the frequency ranges of operation (Salapaka et al., 2002; Schitter et al., 2001), but the loop shaping and gains required to attenuate hysteresis have the negative effect of accentuating high-frequency noise.”
Design and Modeling of a High-Speed AFM-Scanner (2007, background): “Creep of the piezo material can be modeled [29] and, together with the hysteresis, compensated by open-loop [5] or feedback control (e.g., [ 19 ]).”
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, background): “This model is expressed in the following equation [30], [58]: (2) where is the displacement of the piezo-actuated stage when subjected to a fixed input voltage, is the time at which the creep effect is obvious, is the displacement at the time of after applying the input voltage, and is a…”
Feedback for physicists: A tutorial essay on control (2005, background): “An example of an NMP system that arises in physics instrumentation is found in a recent study of the dynamics of a piezoelectric stage (Salapaka et al., 2002).”
Tracking control of a piezoceramic actuator with hysteresis compensation using inverse Preisach model (2005, methodology): “sitioning, such as atomic force microscopes [17], [23], [24] and micro-manipulators [19].”
A New Scanning Method for Fast Atomic Force Microscopy (2011, background): “Other examples of successful applications of feedback-control techniques include [13]–[17].”
Robust Adaptive Control of Coupled Parallel Piezo-Flexural Nanopositioning Stages (2009, background): “Some robust control schemes, however, do not require a hysteresis model [22], [23]; although performance is improved compared to classical methods, parametric uncertainties have not been taken into account.”
A Survey of Control Issues in Nanopositioning (2007, methodology): “Piezoelectric tube scanners are now used extensively in SPM and many other applications that involve nanopositioning [36], [94]–[97].”
Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning (2009, background): “microscopy, lithography, nanometrology, beam steering for optical communication systems, fabrication, and assembly of nanostructures [1]–[9].”
Design methodologies for robust nano-positioning (2005, background): “However, their use is hampered by nonlinear effects such as hysteresis, which can be as large as 10%-15% in large traversals, and creep, which become prominent in slow experiments [11], [12].”