Robust Adaptive Control of Coupled Parallel Piezo-Flexural Nanopositioning Stages

By Saeid Bashash, Nader Jalili. IEEE/ASME transactions on mechatronics, 2009

158 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/5ab2e0196f5e676aede93b235aa4c3844f1169df

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Han Ding
2. Andrew J. Fleming
3. Chun-Yi Su
4. Guoying Gu
5. Limin Zhu
6. Sergej Fatikow

In Control and Systems Engineering

1. Limin Zhu
2. Guoying Gu
3. Han Ding
4. Sergej Fatikow
5. Andrew J. Fleming
6. Chun-Yi Su
7. Mou Chen
8. Shuzhi Sam Ge

In Mechanical Engineering

1. Limin Zhu
2. Han Ding
3. Chun-Yi Su
4. Guoying Gu
5. Sergej Fatikow
6. Andrew J. Fleming
7. Qizhi Xie
8. S. O. Reza Moheimani

Citations in the corpus

• Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation (2013, background): “Surprisingly, until now there is no such a complete description available in the literature though a lot of papers have addressed this issue [7]–[11], [18], [19].”
• Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, background): “The advantages of the robust adaptive controllers for high-performance motion control of piezo-actuated systems have been well verified through recent studies [20], [81], [134], [136], [178]–[180].”
• Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control (2010, methodology): “If the reference signal is periodic, iterative feedforward control [32], [33] and adaptive control [34] can be applied.”